Spatially selective hydrogen irradiation/removal of dilute nitrides: A versatile nanofabrication tool for photonic applications
Conference Paper
Publication Date:
2019
abstract:
The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering. ? OSA 2019 ? 2019 The Author(s)
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Atoms; Nitrides; Particle beams; Quantum optics; Refractive index; Dilute nitride semiconductors; Dilute nitrides; Hydrogen atoms; Hydrogen irradiation; Photonic application; Single photon emitters; Photonic devices
List of contributors:
Gerardino, Annamaria; Pettinari, Giorgio; Rubini, Silvia
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