Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window

Articolo
Data di Pubblicazione:
2008
Abstract:
DC-Pulsed Magnetron Sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6” Silicon wafers. Integrated p-n photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
DC-Pulsed Magnetron Sputtering (PMS)
Elenco autori:
Autori di Ateneo:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/41038
Pubblicato in:
PROCEEDINGS OF THE IEEE
Journal