Data di Pubblicazione:
2008
Abstract:
The measurement of impurity concentration in compound semiconductors reaches extremely high sensitivity. On the contrary, the methods for off-stoichiometry determination in II-VI crystals are not satisfactory. Some of the authors developed (in the past) a method for determining the off-stoichiometry in CdTe crystals measuring the high-temperature optical densities of vapors in equilibrium with solid samples. Thanks to accurate calibrations, the partial pressure of the vapor/solid systems could be derived and exploited to evaluate the sample off-stoichiometry. In the present work, the calibration procedures are shown for the determination of partial pressure for sulfides and selenides. The off-stoichiometry is derived for ZnTe, CdS and CdSe samples and the method effectiveness is confirmed.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
81.05.Dz II-VI semiconductors; 81.30.Dz Phase diagrams of other materials (for phase diagrams of superconductors, see 74.25.Dw); 81.70.Jb Chemical composition analysis, chemical depth and dopant profiling; Characterization; Phase equilibria
Elenco autori:
Spano, Nunzia; Mazzera, Margherita; Paorici, Carlo; Zappettini, Andrea
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