Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications

Contributo in Atti di convegno

Data di Pubblicazione:

2017

Abstract:

MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1-xSrxMnO3, with x ? 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors. Keywords:

Tipologia CRIS:

04.01 Contributo in Atti di convegno

Keywords:

microbridges; micropirani; uncooled bolometers

Elenco autori: