Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications

Conference Paper
Publication Date:
2017
abstract:
MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1-xSrxMnO3, with x ? 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors. Keywords:
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
microbridges; micropirani; uncooled bolometers
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/404792
Published in:
PROCEEDINGS (MDPI)
Journal