Thermally induced self-assembly of cylindrical nanodomains in low molecular weight PS-b-PMMA thin films
Academic Article
Publication Date:
2014
abstract:
The phase behaviour in thin films of an asymmetric polystyrene-b-polymethylmethacrylate (PS-b-PMMA) block copolymer with a molecular weight of 39 kg mol 1 was assessed at a wide range of temperatures and times. Cylindrical PMMA structures featuring a diameter close to 10 nm and perpendicularly oriented with respect to the substrate were obtained at 180 degrees C in relatively short annealing times (t <= 30 min) by means of a simple thermal treatment performed in a standard rapid thermal processing machine.
Iris type:
01.01 Articolo in rivista
Keywords:
PS-b-PMMA; block copolymer; rapid thermal processing (RTP); self-assembling; nanolithography
List of contributors:
FERRARESE LUPI, Federico; Giammaria, TOMMASO JACOPO; Perego, Michele; Seguini, Gabriele
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