Thermochemistry of the E-ALD process for the growth of CuxZnyS on Ag(111): Interpretation of experimental data

The electrochemical atomic layer deposition (E-ALD) growth of chalcogenides materials enables the deposition of technologically interesting ultra-thin films. However, this method raises some questions about the actual growth mechanism. We addressed one of the more interesting anomalies reported lately: the occurrence of the Zn-deficiency and of the polycrystalline thread-like overgrown structures in the E-ALD growth of CuxZnyS. The present study was developed using a computational speciation approach under the mass balance method. Exploiting a well-established computational approach, but uncommonly applied to the electrochemical science, we calculated the predominance charts and the equilibrium speciation of the solid phases during the electrochemical process. On this basis, we obtained a deep insight into the mechanism underlying the E-ALD process from a thermodynamic standpoint. Thus, we identified the crucial steps of the CuxZnyS growth leading to the anomalies object of this research.