A micromachined bistable 1 x 2 switch for optical fibers

Using bulk micromachining techniques, a 1x2 optical fiber switch has been fabricated. The optical signal is carried by a standard monomodal fiber. Switching is based on asymmetrical Joule heating of a Y-shaped cantilever structure by means of two integrated chromium thin film resistors; both electrical and optical properties are promising. A lock-release mechanism, based on silicon micromachined hooks, has also been tested. This mechanism allows the fabrication of a mechanically bistable device, that needs electrical power only during switching.