A micromachined Xenon flow regulator for space applications

A Xenon how regulator based on the dependence of the mass flow from the absolute temperature of the gas pipeline, is proposed. The device is fabricated by means of micromachining and has an area of 1 cm(2) and a weight of few grams. The pipeline is integrated on a silicon substrate while the heater is a chromium resistor deposited on the glass cover: silicon substrate and glass cover are bonded together by means of the anodic bonding technique. Measurements of the dependence of the mass flow from the pressure drop and the absolute temperature are presented and discussed.