Cathodoluminescence study of H-implanted B-doped diamond samples

This paper reports a catholuminescence (CL) spectroscopy study of a high pressure high temperature (HPHT) B-doped diamond implanted with hydrogen. CL spectra were acquired with different electron beam energies, allowing the analysis from different depths of the sample. In this way both the implanted layer and the boundary region were investigated. Several features were detected, related both to the acceptor compensation and to lattice damage from the ion implantation process. The sample was subsequently annealed (temperatures up to 1000 °C) and the behaviour of the signals was followed with CL spectroscopy, showing the changes in the lattice structure. © 2003 Elsevier B.V. All rights reserved.