Scanning capacitance microscopy on cross section and bevelled samples

Scanning capacitance microscopy (SCM) was performed on p(+)p, p(+)n, pn, n(+)n, n(+)p, and np samples in cross section and bevelled configuration. The bevelling or sectioning sample preparation procedure was found to strongly influence the results of SCM. However, we demonstrate that a significant magnification can be obtained in determining the junction depth by using bevelled samples with respect to cross-sections.