Interaction of atomic hydrogen with Zn-polar and O-polar ZnO surfaces

The interaction of Zn-polar and O-polar ZnO surfaces with atomic hydrogen produced by a remote rf plasma source is investigated in situ and in real time using spectroscopic ellipsometry. It is found that the reactivity of ZnO with atomic hydrogen depends on polarity. The interaction of O-polar surfaces with atomic hydrogen at 100 C is suitable for producing clean surfaces, while Zn-polar surfaces strongly react with atomic hydrogen resulting in a disruption of the ZnO lattice with formation of Zn surface clusters