On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing

This paper deals with the quadrupole mass spectrometric evaluation of fluoro-compd. emissions during plasma processing. A crit. discussion of the anal. procedure including the estn. of quantification limits, detection limits, and t-Student test, is reported. The use of pos. and neg. chem. ionization as the ionization source to reduce the interference due to peak overlapping is also examd.