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Magnetic resonance spectroscopy of defects at the dielectric-semiconductor interface: Ge substrates and Si nanowires

Academic Article
Publication Date:
2011
abstract:
High mobility substrates and silicon nanowires are important key elements in the development of advanced devices targeting a vast range of functionalities. In almost all applications the interface between the semiconductor and the oxide layer placed on top or all around plays a crucial role in determining the device performance. The investigation of defects at these interfaces is therefore mandatory to fully exploit the advantages of these systems. We report on the application of electrically detected magnetic resonance (EDMR) techniques in the investigation of defects at the interface between Ge and GeO(2) (or GeO(x)) and at the interface between silicon nanowires (SiNWs) and SiO(2).
Iris type:
01.01 Articolo in rivista
List of contributors:
Molle, Alessandro; Fanciulli, Marco
Authors of the University:
MOLLE ALESSANDRO
Handle:
https://iris.cnr.it/handle/20.500.14243/38064
Published in:
MICROELECTRONIC ENGINEERING
Journal
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