SCANNING ELECTRON-ACOUSTIC MICROSCOPY OF MISFIT DISLOCATIONS IN INGAAS/GAAS SUPERLATTICES

The ability of scanning electron acoustic microscopy (SEAM) to image misfit dislocations in heterostructures is shown in the case of InGaAs/GaAs superlattices. The SEAM images are compared with panchromatic cathodoluminescence (PCL) images of the same samples and the differences are discussed.