Publication Date:
1996
abstract:
Photoelectrochemistry may be performed on semiconductor wafers without application of metal contacts, using a cell in which the semiconductor sample is clamped between two suitable electrolytic solutions. Electrochemical control is obtained by applying a potential difference between two metal electrodes inserted in the solutions. The possibilities of semiconductor characterization and processing are discussed for InP and GaAs, using I-/I3- solutions for the back electrolytic contact.
Iris type:
01.01 Articolo in rivista
Keywords:
Bipolar semiconductors; Dual electrolyte cell; Photoelectrochemistry
List of contributors: