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Dimethylaminosilanes fed inductively coupled plasmas for silicon nitride deposition
Academic Article
Publication Date:
2008
Iris type:
01.01 Articolo in rivista
List of contributors:
D'Agostino, Riccardo; Fracassi, Francesco; DI MUNDO, Rosa; Palumbo, Fabio
Authors of the University:
PALUMBO FABIO
Handle:
https://iris.cnr.it/handle/20.500.14243/34418
Published in:
PLASMA PROCESSES AND POLYMERS (PRINT)
Journal
