Self-consistent modeling of the effect of wall-neutral reactions on parallel plate radio frequency discharge plasma in pure hydrogen

Academic Article

Publication Date:

2007

Iris type:

01.01 Articolo in rivista

List of contributors:

Capitelli, Mario; Diomede, Paola; Longo, Savino

Handle:

https://iris.cnr.it/handle/20.500.14243/33614

Published in:

IEEE TRANSACTIONS ON PLASMA SCIENCE

Journal