Deposition and Characterization of Dielectric Thin Films from Allyltrimethylsilane Glow Discharge

Academic Article
Publication Date:
2007
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/33580
Published in:
PLASMAS AND POLYMERS
Journal