Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications

Chapter
Publication Date:
2012
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/268113
Book title:
Ion Implantation