Nanoscale three-dimensional reconstruction of elastic and inelastic mean free path lengths by electron holographic tomography

Electron holography at medium resolution simultaneously probes projected electrostatic and magnetostatic potentials as well as elastic and inelastic attenuation coefficients with a spatial resolution of a few nanometers. In this work, we derive how the elastic and inelastic attenuation can be disentangled. Using that result, we perform the first three dimensional tomographic reconstruction of potential and (in) elastic attenuation in parallel. The technique can be applied to distinguish between functional potentials and composition changes in nanostructures, as demonstrated using the example of a GaAs-Al0.33Ga0.67As core-shell nanowire. (C) 2014 AIP Publishing LLC.