Glow discharge deposition of a-Si:H from SiH4-H2 mixtures: Langmuir probe and optical emission spectroscopy for plasma diagnostics
Conference Paper
Publication Date:
1988
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Cicala, Grazia
Book title:
Commission of the European Communities 8th European Photovoltaic Solar Energy Conference Proceedings