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Damage and recovery in doped SOI layers after high energy implantation
Conference Paper
Publication Date:
2004
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Nobili, Dario; Ferri, Matteo; Armigliato, Aldo; Lulli, Giorgio; Solmi, Sandro; Bianconi, Marco
Authors of the University:
BIANCONI MARCO
FERRI MATTEO
Handle:
https://iris.cnr.it/handle/20.500.14243/148959
