Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method
Articolo
Data di Pubblicazione:
2005
Abstract:
Phase shifting interferometry is a preferred technique for high-resolution phase profile
measurement, but the difficulty in generating the requested shifted pattern has limited the use
of the technique to low-noise environment and in case accurate calibration of the phase
shifting device is available. In the present experiment, a sample having one-dimensional
straight phase boundary is mounted in one arm of an interferometer. One single image of the
fringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of thesample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
interferometry; phase measurement; holography; phase-shift; profilometry
Elenco autori:
DE ANGELIS, Marella; DE NICOLA, Sergio; Finizio, Andrea; Ferraro, Pietro; Grilli, Simonetta; Pierattini, Giovanni
Link alla scheda completa:
Pubblicato in: