Plasmachemical reduction of silicon halocompounds for amorphous silicon films

Conference Paper
Publication Date:
1987
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/116064
Book title:
8th International Symposium on Plasma Chemistry, (ISPC-8) Proceedings IUPAC