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Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique
Academic Article
Publication Date:
2008
Iris type:
01.01 Articolo in rivista
List of contributors:
Ferri, Matteo; Mancarella, Fulvio; Roncaglia, Alberto
Authors of the University:
FERRI MATTEO
MANCARELLA FULVIO
Handle:
https://iris.cnr.it/handle/20.500.14243/29623
