Tridimensional characterization of voids in self-annealed implanted silicon using electron holography

Academic Article
Publication Date:
1997
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/119482
Published in:
HELVETICA PHYSICA ACTA
Journal