Molybdenum-silicon aperiodic multilayer broadband polarizer for 13-30 nm wavelength range, wavelength range

Aperiodicmolybdenum/silicon(Mo/Si)multilayerdesignedasabroadbandpolarizerwithreflectivity over awidewavelengthrangeof13-30nmatafixedincidenceangleof451 was developedbya numericalmethod.Themultilayerwaspreparedusingdirectcurrentmagnetronsputtering. The reflectivityandpolarizingpropertieswerecharacterizedusingsynchrotronradiation.In13- 30 nmwavelengthregion,themeasured s-reflectivity(Rs) withstandarddeviationis13.5%73.1%, p-reflectivity(Rp) withstandarddeviationis1.4%70.5%. Themeanofpolarizationdegreeis81.2%.This broadbandmultilayerpolarizercanbeusedinextremeultravioletpolarizationmeasurements,andwill greatlysimplifyexperimentalarrangements