Process optimisation of a MEMS based PZT actuated microswitch

Academic Article

Publication Date:

2014

abstract:

[object Object]

Iris type:

01.01 Articolo in rivista

Keywords:

MEMS; Microcantilever; Microswitch; PZT

List of contributors:

Marasso, SIMONE LUIGI; Cocuzza, Matteo

Authors of the University:

MARASSO SIMONE LUIGI

Handle:

https://iris.cnr.it/handle/20.500.14243/261285

Published in:

MICROELECTRONIC ENGINEERING

Journal

Overview

URL

http://www.scopus.com/record/display.url?eid=2-s2.0-84899640164&origin=inward