A CMOS-compatible process for thermopiles with high sensitivity in the 3-5 µm atmospheric window

Conference Paper

Publication Date:

2005

Iris type:

04.01 Contributo in Atti di convegno

List of contributors:

Mancarella, Fulvio; Tamarri, Fabrizio; Roncaglia, Alberto; Severi, Maurizio; Cardinali, GIAN CARLO

Authors of the University:

MANCARELLA FULVIO

RONCAGLIA ALBERTO

TAMARRI FABRIZIO

Handle:

https://iris.cnr.it/handle/20.500.14243/144330