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Ultraviolet laser processing of SmS films

Articolo
Data di Pubblicazione:
2002
Abstract:
Samarium monosulfide (SmS) films deposited by flash evaporation to realise pressure sensors have been processed by ultraviolet laser radiation at 308 nm to modulate their electrical resistance. The laser irradiation effects on the resistance of SmS films have been investigated at different laser fluences. It is shown that the SmS film resistance can be significantly modulated, even at fluences lower than the laser ablation fluence. The effects induced by laser processing on the film surface structure have also been investigated.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
Laser irradiation; Semiconductors; Sensors
Elenco autori:
Leo, Gabriella
Autori di Ateneo:
LEO GABRIELLA
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/25903
Pubblicato in:
THIN SOLID FILMS
Journal
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