Y2O3 thin films characterized by XPS

Y2O3 thin films were synthesized by Chemical Vapor Deposition (CVD) using Y(acac)3.xH2O (Hacac= 2,4-pentanedione) as precursor. This work is focused on the X-ray Photoelectron Spectroscopy (XPS) characterization of an Y2O3 thin film deposited on glass substrate at 450°C in N2+O2 atmosphere and subsequently annealed in air at 1000°C. Besides the wide scan spectrum, charge corrected binding energies for the Y3d5/2, Y3d3/2, O1s and C1s surface photoelectron signals are reported.