Plasma Deposition of a-Si,Ge:H,F Thin Films from SiF4-GeH4-H2 Mixtures

Abstract
Publication Date:
1987
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/142489
Book title:
Abstracts Fall Meeting of the Material Research Society (MRS)