Novel approaches to plasma deposition of amorphous silicon-based materials

Abstract
Publication Date:
1991
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/142462
Book title:
Proceeding of 10th International Symposium on Plasma Chemistry, (ISPC-10) IUPAC