Self-planarizing process for shallow trench isolation

Patent

Publication Date:

2003

Iris type:

06.01 Brevetto di invenzione industriale

Keywords:

Microelectronics; Nanotecnologie

List of contributors:

Fazio, Barbara

Authors of the University:

FAZIO BARBARA

Handle:

https://iris.cnr.it/handle/20.500.14243/142324