Method for manufacturing a SOI wafer

Patent

Publication Date:

2003

Iris type:

06.01 Brevetto di invenzione industriale

Keywords:

electrochemical etch; porous silicon; SOI wafer

List of contributors:

D'Arrigo, GIUSEPPE ALESSIO MARIA; Spinella, ROSARIO CORRADO

Authors of the University:

D'ARRIGO GIUSEPPE ALESSIO MARIA

SPINELLA ROSARIO CORRADO

Handle:

https://iris.cnr.it/handle/20.500.14243/142270