Method of fabricating electronic devices integrated in semiconductor substrates provided with gettering sites, and a device fabricated by the method

Brevetto

Data di Pubblicazione:

2004

Tipologia CRIS:

06.01 Brevetto di invenzione industriale

Keywords:

Electronic devices; Gettering; Ion implantation; NULL; NULL

Link alla scheda completa:

https://iris.cnr.it/handle/20.500.14243/142261