Publication Date:
2000
abstract:
Technical polycrystalline sintered Al2O3 90%. substrates have been irradiated, in a vacuum chamber, at grazing incident
angles ;308., with pulsed ArF ls193 nm, hns6.4 eV. excimer laser, at different fluences and numbers of pulses, to
modify the structure and morphology of the surface. Vacuum, inert gas and oxygen atmospheres, at different substrate
temperatures, ;25°C and ;700#C, have been used to study surface chemistry and morphology modifications induced by
laser energy. Surface chemistry has been analysed by XPS spectroscopy. Morphological modifications have been studied by
SEMrEDS microscopy. Changes in surface roughness have been quantified by a standard profilometer.
angles ;308., with pulsed ArF ls193 nm, hns6.4 eV. excimer laser, at different fluences and numbers of pulses, to
modify the structure and morphology of the surface. Vacuum, inert gas and oxygen atmospheres, at different substrate
temperatures, ;25°C and ;700#C, have been used to study surface chemistry and morphology modifications induced by
laser energy. Surface chemistry has been analysed by XPS spectroscopy. Morphological modifications have been studied by
SEMrEDS microscopy. Changes in surface roughness have been quantified by a standard profilometer.
Iris type:
01.01 Articolo in rivista
Keywords:
Pulsed laser treatment; Al2O3 Ceramic surface modification; XPS surface analysis; SEM-EDAX analysis; Surface roughness
List of contributors:
Cappelli, Emilia; Orlando, Stefano; Sciti, Diletta
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