Room-temperature nanoimprint lithography onto non-thermoplastic organic films

A grating resolution of up to 200 nm is achieved using room-temperature nanoimprint lithography on several different light-emitting low-molar-mass organic semiconductors, without any degradation of the active materials after patterning (see Figure). This could be the only process that permits the transfer of a height profile to films of this very important class of low-molar-mass conjugated molecules with poor thermoplastic behavior.