High quality factor 1-D Er3+-activated dielectric microcavity fabricated by RF-sputtering

Rare earth-activated 1-D photonic crystals were fabricated by
RF-sputtering technique. The cavity is constituted by an Er3+-doped SiO2
active layer inserted between two Bragg reflectors consisting of ten pairs of
SiO2/TiO2 layers. Scanning electron microscopy is employed to put in
evidence the quality of the sample, the homogeneities of the layers thickness
and the good adhesion among them. Near infrared transmittance and
variable angle reflectance spectra confirm the presence of a stop band from
1500 nm to 2000 nm with a cavity resonance centered at 1749 nm at 0° and
a quality factor of 890. The influence of the cavity on the 4I13/2 -> 4I15/2
emission band of Er3+ ion is also demonstrated.