Oxygen chemisorption on cleaved InP(110) surfaces studied with surface differential reflectivity

We present surface-differential-reflectivity results on the oxidation of InP(110) surfaces in the energy range between 2.0 and 4.0 eV. Absorption kinetics is analyzed by following the reflectivity variation between 1×102 and 2×106 langmuirs of molecular oxygen at three selected spectral energies. Several well-defined steps of the oxidation process are clearly resolved and discussed in terms of the disappearance of intrinsic surface states, the creation of acceptor and donor defect states, and the growth of In2O3.