Publication Date:
2008
abstract:
A cheap nanofabrication process for titania (TiO2 ) polycrystalline nanowire array for gas sensing applications with lateral size ranging from 90
to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors
focused on a standard 365 nm UV photolithographic process able to fabricate sol-gel nanostructured titania nanowires from a solid thin film. Main
aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different
kinds of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations;
experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device
with solid sensitive film without patterning, in order to validate effects of nanomachining on sensitive material response.
to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors
focused on a standard 365 nm UV photolithographic process able to fabricate sol-gel nanostructured titania nanowires from a solid thin film. Main
aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different
kinds of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations;
experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device
with solid sensitive film without patterning, in order to validate effects of nanomachining on sensitive material response.
Iris type:
01.01 Articolo in rivista
List of contributors:
Taurino, Antonella; Francioso, LUCA NUNZIO; Forleo, Angiola; Siciliano, PIETRO ALEARDO
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