An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications

In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive
microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements
composing the equivalent circuit are computed by means of a fully analytic approach. In particular,
the contribution of resistive and inductive parasitic elements has been evaluated by using
closed-form expressions. Configurations characterized by different technological solutions have
been obtained and modeled. Simulations performed with the proposed approach correlate very well
with actual measurements.