Skip to Main Content (Press Enter)

Logo CNR
  • ×
  • Home
  • People
  • Outputs
  • Organizations
  • Expertise & Skills

UNI-FIND
Logo CNR

|

UNI-FIND

cnr.it
  • ×
  • Home
  • People
  • Outputs
  • Organizations
  • Expertise & Skills
  1. Outputs

Determination of C54 nucleation site density in narrow stripes by sheet resistance measurements and OEº-Raman spectroscopy

Academic Article
Publication Date:
2000
abstract:
The kinetic of the C49-C54 phase transformation at 730 ¬?C in TiSi2 narrow strips for width in the 0.5-1.3-OEºm range was investigated by resistance measurements and OEº-Raman spectroscopy. With this last technique a growth rate of 0.15 OEºm/s and a nucleation density of about 0.035 sites/OEºm2 were obtained. The fraction of the transformed material as measured by resistance follows the Johnson-Mehl-Avrami equation, with an exponent equal to 1 for all of the analyzed linewidths. Nucleation site saturation occurs and the growth is one-dimensional along the length of the strip. The characteristic time increases as 1/W, W being the width of the strip, and, taking into account the growth rate obtained by OEº-Raman spectroscopy, the nucleation density resulted 0.034 sites/OEºm2 in excellent agreement with the OEº-Raman results.
Iris type:
01.01 Articolo in rivista
List of contributors:
LA VIA, Francesco; Privitera, STEFANIA MARIA SERENA
Authors of the University:
LA VIA FRANCESCO
PRIVITERA STEFANIA MARIA SERENA
Handle:
https://iris.cnr.it/handle/20.500.14243/125857
Published in:
MICROELECTRONIC ENGINEERING
Journal
  • Use of cookies

Powered by VIVO | Designed by Cineca | 26.5.1.0 | Sorgente dati: PREPROD (Ribaltamento disabilitato)