High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates
Articolo
Data di Pubblicazione:
2008
Abstract:
We demonstrate high-performance nanowire superconducting
single photon detectors (SSPDs) on bN thin films grown at a temperature
compatible with monolithic integration. NbN films ranging from 150nm
to 3nm in thickness were deposited by dc magnetron sputtering on MgO
substrates at 400oC. SSPDs were fabricated on high quality NbN films of
different thickness (7 to 3nm) deposited under optimal conditions. Electrical
and optical characterizations were performed on the SSPDs. The highest
QE value measured at 4.2K is 20% at 1300nm.
single photon detectors (SSPDs) on bN thin films grown at a temperature
compatible with monolithic integration. NbN films ranging from 150nm
to 3nm in thickness were deposited by dc magnetron sputtering on MgO
substrates at 400oC. SSPDs were fabricated on high quality NbN films of
different thickness (7 to 3nm) deposited under optimal conditions. Electrical
and optical characterizations were performed on the SSPDs. The highest
QE value measured at 4.2K is 20% at 1300nm.
Tipologia CRIS:
01.01 Articolo in rivista
Elenco autori:
Gaggero, Alessandro; Mattioli, Francesco; Leoni, Roberto
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