Structural and morphological evolution of aluminum nitride thin films: influence of additional energy to the sputtering process

Academic Article

Publication Date:

2013

Iris type:

01.01 Articolo in rivista

List of contributors:

Quaranta, Fabio; Catalano, Massimo; Creti', Pasquale; Martucci, MARIA CONCETTA; Taurino, Antonietta; Signore, MARIA ASSUNTA; Siciliano, PIETRO ALEARDO

Authors of the University:

CATALANO MASSIMO

CRETI' PASQUALE

MARTUCCI MARIA CONCETTA

QUARANTA FABIO

SICILIANO PIETRO ALEARDO

SIGNORE MARIA ASSUNTA

TAURINO ANTONIETTA

Handle:

https://iris.cnr.it/handle/20.500.14243/7106

Published in:

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS

Journal

Overview

URL

http://www.sciencedirect.com/science/article/pii/S0022369713001911