ENERGY-LOSS AND EQUILIBRIUM CHARGE-DISTRIBUTION OF NITROGEN-IONS TRANSMITTED THROUGH THIN SILICONCRYSTALS

Transmission experiments of 1.0-1.8 MeV N+ ions through thin Si crystals in random, [100] and [110] alignment geometries were performed. An electromagnetic analyser was used to simultaneously measure the charge distribution and the energy of the transmitted beams. The emerging ions had charge values ranging from 0 to 4 and equal average energy. Stopping power data were collected in both random and channeling geometries using samples with thickness ranging from 0.2 to 0.5 mum. The mean and the effective charge values of the transmitted ions were found to agree with the charge and the effective charge values calculated by the model of Brandt and Kitagawa [Phys. Rev. B25 (1982) 5631].